High-Precision Alignment Servo of Planar Microlens Array.
نویسندگان
چکیده
منابع مشابه
A high numerical aperture, polymer-based, planar microlens array.
We present a novel microfabrication approach for obtaining arrays of planar, polymer-based microlenses of high numerical aperture. The proposed microlenses arrays consist of deformable, elastomeric membranes that are supported by polymer-filled microchambers. Each membrane/microchamber assembly is converted into a solid microlens when the supporting UV-curable polymer is pressurized and cured. ...
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ژورنال
عنوان ژورنال: TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C
سال: 1993
ISSN: 0387-5024,1884-8354
DOI: 10.1299/kikaic.59.1103